1200 degree 1500 degree 1700 degree CVD growth system
The CVD system is a tube furnace with different temperatures, such as 1200 degree 1500 degree 1700 degree , single temperature zone, double temperature zone, and three temperature zones. The tube diameters are 50mm, 60mm, 80mm, 100mm quartz or corundum tubes, Mass flow meters or float flow meters with precision gas flow controllers, and a vacuum system consisting of a VRD series Two-stage rotary vacuum pump and KYKY FJ-110E turbo pump unit , The specific requirements are configured according to customer needs. Laboratory research shows that the CVD system can be used for sintering in a protective atmosphere environment, as well as for the preparation of various thin films, such as graphene film growth, nanotube growth, and 2D material growth，Diamond growth.
The following image shows the CVD matched with a furnace and a flow meter vacuum pump at different temperatures
1.1200 degree single temperature zone tube furnace 3-way mass flow meter vacuum pump CVD system
2.1500 degree single temperature zone 3-way float flowmeter two-stage rotary vacuum pump CVD system
3.1700 degree single temperature zone 3-way proton flow meter two-stage rotary vacuum pump CVD system
Specifications
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Product Name
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1200 degree 1500degree 1700 degree Tube Furnace
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Heating zones
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Single heating zone,Two heating zone,Three heating zone
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Heating zone length
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440mm (single temperature zone) 220mm+220mm (double temperature zone) 220mm+440mm+220mm (three temperature zone) (1500C1700C does not have three temperature zones)
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Constant temperature zone length
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260mm (single temperature zone) 130mm+130mm (double temperature zone) 180mm+440mm+180mm (three temperature zone) (1500C1700C does not have three temperature zones)
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Tube Material
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high purity quartz tube，corundum tube
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Tube Size
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1200 degree quartz tube OD50 * 1000, OD60 * 1000, OD80 * 1000, OD100 * 1000mm, three temperature zone length, quartz tube length is 1400mm Single temperature zone corundum tube size OD50 * 1000, OD60 * 1000, OD80 * 1000 at 1500 and 1700 degrees Dual temperature zone corundum tube size OD50 * 1200, OD60 * 1200, OD80 * 1200 at 1500 and 1700 degrees
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Thermcouple
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K- type,S- Type,B-type
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Heating rate
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20c/min,adjustable suggestion 10 degree/min
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Heating element
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1200 degree Resistance wire,1500 degree SiC Rod,1700 degree MoSi2 Rod
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Sealing Method
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stainless steel vacuum flange
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Vacuum Air-tightness
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9.8×10-4Pa
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Temperature Accuracy
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±1℃
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Control Mode
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Intelligent PID programmable Control,30 steps sintering curve restore
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Flow meter
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mass flow controller,float flow meter controller
for one channal ,two channal,Three channal ,Four channal
The below is 3 channal mass flow meter controller
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Flowmeter Core
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304 stainless steel
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Measure Accuracy
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+/- 1.0% F.S
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Pressure Range
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-0.1~0.15MPa
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A way gas range
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0~100SCCM
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B way gas range
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0~200SCCM
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C way gas range
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0~500SCCM,or as customized
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Pump system
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VRD-4 Two-stage rotary vacuum pump
system and KYKY FF-110E turbo pump Unit
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Displacement speed
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4 (1.1)
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Ultimate partial pressure gas ballast closed (Pa)
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5x10-2
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Ultimate total pressure gas ballast closed (Pa)
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5x10-1
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Ultimate total pressure gas ballast open (Pa)
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3
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Power rating (kW)
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0.4/0.37
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Intake and exhaust DN (mm)
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KF16/25
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Oil capacity (L)
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0.6~1.0
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Motor speed (rpm)
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1440
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Ambient temperature (°C)
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5 - 40
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Noise level (dB)
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≤56
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Power Supply
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AC220V 50Hz
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